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FOUP Cleaning Machine Product List

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FOUP cleaning device

FOUP cleaning device

It is a device that uses a special high-pressure nozzle, allowing for cleaning and drying without the use of chemicals.

【Reduction of Environmental Impact】 - Only pure water is used for the cleaning solution. - The amount of pure water used is less compared to other products. 【High Cleaning Capability】 - Capable of cleaning residues and particles with a unique cleaning process. - Can generate warm air instantly. (From room temperature to 65°C in 3 seconds) - Allows for separate cleaning of the FOUP BOX and its lid. - Rapid cleaning of stubborn adhesives and particles is possible with the adoption of instant heating. - High-pressure cleaning enables the removal of contaminants with strong adhesion, such as resist. *Max approximately 10MPa (1500psi) can be adjusted in the recipe.

  • Other semiconductor manufacturing equipment
  • FOUP Cleaning Machine

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FOUP cleaning device

FOUP cleaning device

Cleaning difficult-to-wash uneven surfaces with high-pressure pulse jets! More stable cleaning results can be achieved compared to manual cleaning.

This is a cleaning device that performs cleaning of various boxes using high-pressure pulse jets while maintaining a constant distance from the items being cleaned with a multi-joint robot. It is capable of handling the cleaning to drying process. 【Features】 ■ Cleaning tailored to complex shapes such as hoops ■ Automation of the cleaning process, ensuring stable cleaning effectiveness *For more details, please contact us or download the catalog to view.

  • Other semiconductor manufacturing equipment
  • FOUP Cleaning Machine

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FOUP cleaning device

FOUP cleaning device

Cleaning difficult-to-clean uneven surfaces with high-pressure pulse jets! More stable cleaning results can be achieved compared to manual cleaning.

This is a cleaning device that performs the cleaning of various boxes using high-pressure pulse jets while maintaining a constant distance from the items being cleaned with a multi-joint robot. It is capable of handling the cleaning to drying process. 【Features】 ■ Cleaning adapted to complex shapes such as hoops ■ Automation of the cleaning process ensures stable cleaning effects *For more details, please contact us or download the catalog to view.

  • Other semiconductor manufacturing equipment
  • Other cleaning machines
  • Ultrasonic Cleaner
  • FOUP Cleaning Machine

Added to bookmarks

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